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Product Description: Specification:
1. Chamber size: 350 x 350 x 50 mm
2. Loading area: 320 x 320 x 50 mm (optinal: chamber height 120 mm)
3. Chamber walls: Aluminium polished, easy to clean (optional: stainless ste...
Related Keywords: RTP Vacuum Furnace RTP System |
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Product Description: Specification:
1. Quartz glass chamber with integrated gas in- and outlet
2. Heating: with Infrared Lamps, total power: 21 kW
3. Loading area: up to 156 mm wafer size
4. Controller: fast PID te...
Related Keywords: RTP Vacuum Furnace Rapid Thermal Processing System |
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