Specification:
1. for single wafer up to 100 mm (4") or 100 mm x 100 mm substrate size 
2. with integrated gas in- and outlet
3. 1 Mass Flow Controller for Nitrogen (5 nlm = norm liter per minute) is default
4. heated by 18 Infrared lamps (20 kW)
5. vacuum up to 10exp-6 hPA  (Turbomolecular pump and vacuum measurement included, excl. rough pump)
6. Max. temperature 1200 °C  
7. temperature control by thermocouple
8. water cooling required
9. Electricity: CEE 3x32 A, 230 V, 3 Phase, +N,20 kW
10. Dimension: 505 x 504 x 670  mm (W x H x D)
11. Weight: approx. 70 kg
12. Good service
13. Please mail us for more details
14. Suitable for laboratory and research department
【 Brand： UNITEMP/GERMAN 】